Mid-Infrared Complex Refractive Index Spectra of Polycrystalline Copper-Nitride Films by IR-VASE Ellipsometry and Their FIB-SEM Porosity

Emilio Márquez, Eduardo Blanco, Jose Manuel Manuel, Manuel Ballester, Marcos Garcia-Gurrea, Maria Isabel Rodriguez-Tapiador, Susana Maria Fernandez, Florian Willomitzer, Aggelos K Katsaggelos
January 2023
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Type
Journal article
Publication
Coatings, 14(1)
Manuel Ballester
Manuel Ballester
Ph.D. Candidate in Electrical and Computer Engineering
Florian Willomitzer
Florian Willomitzer
Associate Professor of Optical Sciences