Complementary Characterization of Polycrystalline Copper-Nitride Films by UV-MIR (0.2-40 $μ$m) Ellipsometry and FIB-SEM Microscopy

Emilio Márquez, Eduardo Blanco, J Manuel Mánuel, Manuel Ballester, Marcos Garcı́a-Gurrea, Susana Fernandez, Mar\' ́Isabel Rordr\ǵuez-Tapiador, Florian Willomitzer, Aggelos K Katsaggelos
January 2023
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Type
Journal article
Publication
Preprint
Manuel Ballester
Manuel Ballester
Ph.D. Candidate in Electrical and Computer Engineering
Florian Willomitzer
Florian Willomitzer
Associate Professor of Optical Sciences