Complementary Characterization of Polycrystalline Copper-Nitride Films by UV-MIR (0.2-40 $μ$m) Ellipsometry and FIB-SEM Microscopy

Emilio Márquez, Eduardo Blanco, J Manuel Mánuel, Manuel Ballester, Marcos Garcı́a-Gurrea, Susana Fernandez, Mar\' ́Isabel Rordr\ǵuez-Tapiador, Florian Willomitzer, Aggelos K Katsaggelos

January 2023

Type

Journal article

Publication

Preprint